Beam Injection Assessment of Defects in Semiconductors

Beam Injection Assessment of Defects in Semiconductors

Description:

The 5th International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98) focussed on many theoretical and experimental aspects of this topic. The aim was to bring together specialists working in the fields of both fundamental research and applications. There were more than 80 participants from 15 countries all over the world.

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Info:

Editors:
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
THEMA:
TGM
BISAC:
TEC021000
Details:
Proceedings of the 5th International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98), held in Parkhotel Schloss Wulkow near Berlin, Germany, August/September 1998
Pages:
550
Year:
1998
ISBN-13 (softcover):
9783908450399
ISBN-13 (CD):
9783038599982
ISBN-13 (eBook):
9783035706826
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