Engineering Research
Materials Science
Engineering Series
Silicon Carbide and Related Materials 2011
Subtitle:
ICSCRM 2011
Description:
Volume is indexed by Thomson Reuters CPCI-S (WoS).
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This two-volume set presents proceedings from a September 2011 conference report on the latest work in microelectronics and MEMS technology based on silicon carbide (SiC) and related materials. Papers reflect recent progress in crystal growth, characterization and control of material properties, and other basic research in silicon carbide and other wide-bandgap semiconductors involving III-nitrides and diamond. They describe the latest research relevant to water production processes, device fabrication technologies, and device applications, as well as the latest developments and commercialization of advanced devices and circuits used for energy saving, high-voltage switching, high-power amplification, and high-temperature operation. Volume 1 compiles papers in chapters on SiC bulk growth, SiC epitaxial growth, physical properties and characterization of SiC, and graphene. Volume 2 presents chapters on processing of SiC, SiC devices, circuits, and systems, and related materials.