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Progress of Microstructure and Texture of High Purity Tantalum Sputtering Target

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Abstract:

In recent years, the IC (integrated circuit) industry has developed rapidly and the chip process technology has developed in the direction of higher density. Because of its good chemical stability, tantalum is used as a sputtering coating material for the diffusion barrier in the copper interconnect process. The uniform microstructure of the tantalum target directly affects the sputtering performance. The fabrication of high-quality thin films requires the tantalum target to have fine and uniform crystal grains and random grain orientation distribution. However, due to the characteristics of tantalum, it is easy to form a microstructure with {100} (<100>//ND) orientation on the surface and {111} (<111>//ND) orientation on the core during cold working. During the fabrication of thin films, the sputtering rate varies with the thickness of the target, which affects the sputtering stability. To provide ideas for improving the uniformity of the microstructure of the tantalum target, this article reviews the preparation processes that affect the grain orientation and size of the high-purity tantalum target, including forging methods, rolling methods, recrystallization annealing, etc., analyze the law of texture evolution of tantalum and introduction the research status of cold working and recrystallization.

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Periodical:

Materials Science Forum (Volume 1035)

Pages:

704-711

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.1035.704

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Online since:

June 2021

Authors:

Jiang Hao Bai, Xiao Dong Xiong*, Jun Feng Luo, Guo Jin Xu, Yong Jun Li

Keywords:

Cold Rolling, High Purity Tantalum, Microstructure, Sputtering Target, Texture

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© 2021 Trans Tech Publications Ltd. All Rights Reserved

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* - Corresponding Author

References

[1] C.A. Michaluk, Correlating discrete orientation and grain size to the sputter deposition properties of tantalum, J. Electron Mater. 31 (2002) 2-9.

DOI: 10.1007/s11664-002-0165-9

Google Scholar

[2] J.M. Zhong, J.L. He, K. Wang, Z.B. Li, H.Z. Jiao and L. Wang, Research on the texture control technology of tantalum barrier materials for chips, R. Metals. 42 (2018) 1273-1280.

Google Scholar

[3] N. Suveen, Mathaudhu and K. Ted Hartwig, Grain refinement and recrystallization of heavily worked tantalum, Mat. Sci. Eng. A. 426 (2006) 128-142.

DOI: 10.1016/j.msea.2006.03.089

Google Scholar

[4] L. Guo, The effect of processing methods and processes on the mechanical properties, grain size and texture of tantalum plates, Central South University (2005).

Google Scholar

[5] J.B. Clark, R.K. Garrett, T.L. Jungling and R.I. Asfahani, Influence of initial ingot breakdown on the microstructural and textural development of high-purity tantalum, Metall Trans. A. 22 (1991).

DOI: 10.1007/bf02650255

Google Scholar

[6] M. Chen, X.G. Zhu, X.P. Wang and X.Y. Wan, Research on Ta grain refinement process, organization and texture, Thermal Processing Technology. 39 (2010) 26-28.

Google Scholar

[7] N. Maury, N.X Zhang, Y. Huang, A.P. Zhilyaev and T.G. Langdon, A critical examination of pure tantalum processed by high-pressure torsion, Mat. Sci. Eng. A. 638 (2015).

DOI: 10.1016/j.msea.2015.04.053

Google Scholar

[8] N. Suveen, Mathaudhu and K.T. Hartwig, Processing microstructure property relationships in severely deformed tantalum, Mat. Sci. Eng. A. 463 (2006).

DOI: 10.1016/j.msea.2006.08.120

Google Scholar

[9] Z.M. Wei, M.J. Yang and M.H. Li, The influence of cold pressing-rolling process on the microstructure and properties of tantalum plate, Rare Metals and Cemented Carbides. (2000) 14-17.

Google Scholar

[10] X.B. Hao, Research on the evolution of microstructure during cold rolling and annealing of high-purity tantalum plates, Chongqing University. (2015).

Google Scholar

[11] C. Deng, Research on rolling deformation and annealing behavior of polycrystalline high-purity tantalum plate, Chongqing University. (2014).

Google Scholar

[12] C.L Briant, E.M. Donald, R.W Balliett and T. Luong, Recrystallization textures in tantalum sheet and wire, Int. J. Refract. Met. H. 18 (2000) 1-8.

DOI: 10.1016/s0263-4368(99)00028-1

Google Scholar

[13] Z.Q. Zhang, D.D. Chen, H. Zhao and S.F. Liu, A comparative study of clock rolling and unidirectional rolling on deformation/recrystallization microstructure and texture of high purity tantalum plates, Int. J. Refract. Met. H. 41 (2013) 453-460.

DOI: 10.1016/j.ijrmhm.2013.06.003

Google Scholar

[14] Y.H. Liu, S.F. Liu, J.L. Zhu, C. Deng, H.Y. Fan, L.F. Cao and Q. Liu, Strain path dependence of microstructure and annealing behavior in high purity tantalum, Mat. Sci. Eng. A. 707 (2017).

DOI: 10.1016/j.msea.2017.09.097

Google Scholar

[15] S.F. Liu, H.Y. Fan, C. Deng, X.B. Hao, Y. Guo and Q. Liu, Through-thickness texture in clock-rolled tantalum plate, Int. J. Refract. Met. H. 48 (2015).

DOI: 10.1016/j.ijrmhm.2014.08.019

Google Scholar

[16] S.F. Liu, X.B. Hao, C. Deng, H.Y Fan and Q. Liu, Revealing substructure in clock-rolled Ta aided with triple focused ion beam, Rare Metals. 36 (2017) 284-288.

DOI: 10.1007/s12598-015-0540-3

Google Scholar

[17] J.L. Zhu, S.F. Liu, Y. Cao, Y.H. Liu, C. Deng and Q. Liu, The effect of cross rolling cycle on the deformation and recrystallization gradient of high purity Ta plate, Acta Metall. Sin. 55 (2019) 1019-1033.

Google Scholar

[18] Y.C. Mao, S.F. Liu, H.Y. Fan and Q. Liu, Evolution of microstructure and texture gradient during cross-rolling of high purity tantalum, J. Chin Electron Micro Soc. 36 (2017) 7-13.

Google Scholar

[19] H.Y. Fan, S.F. Liu, L.J. Li, C. Deng and Q. Liu, Largely alleviating the orientation dependence by sequentially changing strain paths, Mater. Design. 97 (2016) 464-472.

DOI: 10.1016/j.matdes.2016.02.084

Google Scholar

[20] J.L. Zhu, S.F. Liu and D.D. Long, Pass number dependence of through-thickness microstructure homogeneity in tantalum sheets under the change of strain path, Mater Charact. 160 (2019).

DOI: 10.1016/j.matchar.2019.110076

Google Scholar

[21] N. Lin, S.F. Liu, Y.H. Liu, H.Y. Fan, J.L. Zhu and C. Deng, Study on the evolution of microstructure and texture of high-purity tantalum plate during asynchronous rolling and subsequent annealing, J. Chin. Electron Microsc. Soc. 37 (2018)332-338.

Google Scholar

[22] N. Lin, S.F. Liu, Y.H. Liu, H.Y. Fan, J.L. Zhu, C. Deng and Q. Liu, Effects of asymmetrical rolling on through-thickness microstructure and texture of body-centered cubic (BCC) tantalum, Int. J. Refract. Met. H. 78 (2019) 51-60.

DOI: 10.1016/j.ijrmhm.2018.08.012

Google Scholar

[23] D.P. Field, J.M. Yanke, E.V. Mcgowan and C.A. Michaluk, Microstructural development in asymmetric processing of tantalum plate, J. Electron Mater. 34 (2005) 1521.

DOI: 10.1007/s11664-005-0159-5

Google Scholar

[24] H.R.Z. Sandim, H.J. McQueen and W. Blum, Microstructure of cold swaged tantalum at large strains, Scripta Mater. 42 (1999).

DOI: 10.1016/s1359-6462(99)00331-0

Google Scholar

[25] Y.C. Mao, Storage energy and microstructure evolution during rolling and annealing of high-purity tantalum, Chongqing University. (2017).

Google Scholar

[26] Y.H. Liu, S.F. Liu, C. Deng, H.-Y. Fan and Q. Liu, Quasi-in-situ EBSD observation of the orientation evolution in polycrystalline tantalum during rolling deformation, Acta Metall Sin-ENGL. 32 (2019) 1015-1020.

DOI: 10.1007/s40195-019-00885-4

Google Scholar

[27] Y.H. Liu, S.F. Liu, J.L. Zhu, H.Y. Fan, C. Deng, L.F. Cao, X.D. Wu and Q. Liu, Strain accommodation of <110>-normal direction-oriented grains in micro-shear bands of high-purity tantalum, J. Mater. Sci. 53 (2018) 12543-12552.

DOI: 10.1007/s10853-018-2506-y

Google Scholar

[28] Y.C. Mao, Storage energy and microstructure evolution during rolling and annealing of high-purity tantalum, Chongqing University. (2017).

Google Scholar

[29] G.Y. Xu, T. Zhu and G.P. Pan, Detection of cold rolled sheet texture and the effect of rolling process on texture, Anhui Metall. (2003) 15-19.

Google Scholar

[30] C. Deng, S.F. Liu, J.J. li, X.B. Hao and Y.X. Liang, The influence of deformation zone shape parameters on the uniformity of tantalum plate, Rare Metal Mat. Eng. 43 (2014) 2017-2022.

Google Scholar

[31] R.A. Vandermeer, W.B. Snyder, Recovery and recrystallization in rolled tantalum single crystals, Metall. Tran. A. 10 (1979).

Google Scholar

[32] C. Deng, S.F. Liu, X.B. Hao, J.L. Ji, Z.Q. Zhang and Q. Liu, Orientation dependence of stored energy release and microstructure evolution in cold rolled tantalum, Int. J. Refract. Met. H. 46 (2014) 24-29.

DOI: 10.1016/j.ijrmhm.2014.05.005

Google Scholar

[33] H.R.Z Sandim, J.P Martins and A.F Padilha, Orientation effects during grain subdivision and subsequent annealing in coarse-grained tantalum, Scripta Mater. 45 (2001) 733-738.

DOI: 10.1016/s1359-6462(01)01087-9

Google Scholar

[34] J.G. Sevillano, P.V. Houtte and E. Aernoudt, Inhomogeneity in the stored energy of deformed BCC-metals, Scripta Mater. 10 (1976) 775-778.

DOI: 10.1016/0036-9748(76)90361-6

Google Scholar

[35] J.L. Zhu, C. Deng and Y.H. Liu, Effects of annealing temperature on recrystallization texture and microstructure uniformity of high purity tantalum, Metals - Open Access Metall. J. 9 (2019).

DOI: 10.3390/met9010075

Google Scholar

[36] J.L. Zhu, C. Deng, Y.H. Liu and S.F. Liu, Effect of pre-annealing on the recrystallization behavior of pure tantalum, J. Chin Electron Micro Soc. 37 (2018) 607-614.

Google Scholar

[37] M.F. Hupalo, H.R.Z. Sandim, The annealing behavior of oligo crystalline tantalum deformed by cold swaging, Mat. Sci. Eng. A. 318 (2001) 216-223.

DOI: 10.1016/s0921-5093(01)01323-5

Google Scholar

[38] H.R.Z. Sandim, J.P. Martins, A.L. Pinto and A.F. Padilha, Recrystallization of oligocrystalline tantalum deformed by cold rolling, Mat. Sci. Eng. A. 392 (2005) 209-221.

DOI: 10.1016/j.msea.2004.09.032

Google Scholar