High Power-Density 4H-SiC RF MOSFETs

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Abstract:

We have made a 4H-SiC RF power MOSFETs with cutoff frequency up to 12 GHz, delivering RF power of 1.9 W/mm at 3 GHz. The transistors withstand 200 V drain voltage, are normally-off, and show no gate lag, which is often encountered in SiC MESFETs. The measured devices have a single drain finger and a double gate finger and a total gate width of 0.8 mm. To our knowledge this is the first time that power densities above 1 W/mm at 3 GHz are reported for SiC MOSFETs.

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Materials Science Forum (Volumes 527-529)

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1277-1280

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October 2006

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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