Materials Science & Technology

FULLTEXT SEARCH
NEW: Advanced Search
CONFERENCE
9/7/2009 - 9/10/2009
6/28/2009 - 7/3/2009

Increased Growth Rate in a SiC CVD Reactor Using HCl as a Growth Additive

doi:10.4028/0-87849-963-6.73
Get the full paper by clicking here