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Diffusion in Silicon

Volumes 153 - 155
doi: 10.4028/www.scientific.net/DDF.153-155
Abstracts
Paper Titles published in this Main Theme:
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Paper Title Page

Pressure and Stress Effects on Diffusion in Si

Authors: M.J. Aziz

1

Boron Diffusion in Pre-Amorphised Silicon: Interactions with the End of Range Defects

Authors: D. Mathiot, A. Claverie, A. Martinez

11

Stress in Silicon Nitride Films and Its Effect on Boron Diffusion in Silicon

Authors: Satoshi Matsumoto, K. Osada, Y. Zaitsu, T. Shimizu, Eisuke Arai, Shoichiro Tanigawa, F. Uberti

25

Quantum Effects on Hydrogen Diffusion in Silicon

Authors: C.P. Herrero

45

Self-Diffusion in Silicon

Authors: M.M. De Souza, E.M. Sankara Narayanan

69

Diffusion of Si Adsorbates on an Si(001) Surface

Authors: T. Doi, M. Ichikawa, S. Hosoki, K. Ninomiya

81

Vacancies and Vacancy Defects in Si Observed by Positron Annihilation

Authors: Pekka J. Hautojärvi, Kimmo Saarinen, J. Mäkinen, C. Corbel

97

Vacancy Distributions in Silicon and Methods for Their Accurate Determination

Authors: Horst Zimmermann

111

Interaction and Migration Properties of Ion Beam Induced Point Defects in Crystalline Silicon: Basic Research and Technological Relevance

Authors: Emanuele Rimini, Salvatore Coffa, Sebania Libertino, G. Mannino, F. Priolo, Vittorio Privitera

137

Review of Growth Striations in CZ and MCZ Silicon Wafers

Authors: H. Yamagishi

159

Showing 1 to 10 of 13 Paper Titles
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