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Articles by author: Adrien Danel

• Cleaning of Si Surfaces by Lamp Illumination
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p195)
• Cleanliness Management in Advanced Microelectronic
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p159)
• Compatibility of Supercritical Co₂-Based Stripping with Porous Ultra Low-k Materials and Copper
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p113)
• Copper Decontamination Ability of Supercritical-CO₂/Additives on CVD and Spin-On Porous MSQ Materials
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p327)
• Deposition Behavior of Volatile Acidic Contaminants on Metallic Interconnect Surfaces
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p365)
• Detection and Identification of Organic Contamination on Silicon Substrates
  Published in: Ultra Clean Processing of Silicon Surfaces V (p111)
• Dry Cleaning of Organic Contamination on Silicon Wafers Using Rapid Optical Surface Treatment
  Published in: Ultra Clean Processing of Silicon Surfaces V (p59)
• Estimation of Detrimental Impact of New Metal Candidates in Advanced Microelectronics
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p247)
• Influence of Cobalt Contamination in the Measurement of Diffusion Length of Silicon Wafers
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p373)
• Influence of Metal Contamination in the Measurement of p-Type Cz Silicon Wafer Lifetime and Impact on the Oxide Growth
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p297)
• Mapping of Metallic Contamination Using TXRF
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p269)
• New Aspects of the Diluted Dynamic Clean Process
  Published in: Ultra Clean Processing of Silicon Surfaces IV (p19)
• Organic Contamination: Purge Gas Impact in Plastic Storage Boxes
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p105)
• Removal of Heavy Organics by Supercritical CO₂
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p301)
• Silicon Wafer Cleaning Processes Monitoring by the Surface Charge Profiler Method
  Published in: Ultra Clean Processing of Silicon Surfaces V (p47)