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Articles by author: Mehran Mehregany

• A Comparison of SiO₂ and Si₃N₄ Masks for Selective Epitaxial Growth of 3C-SiC Films on Si
  Published in: Silicon Carbide and Related Materials 2000 (p171)
• Advanced Processing Techniques for Silicon Carbide MEMS and NEMS
  Published in: Silicon Carbide and Related Materials 2003 (p1451)
• Behaviour of Polycrystalline SiC and Si Surface-Micromachined Lateral Resonant Structures at Elevated Temperatures
  Published in: Silicon Carbide, III-Nitrides and Related Materials (p889)
• Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching
  Published in: Silicon Carbide and Related Materials - 1999 (p1145)
• Characterization of Low Stress, Undoped LPCVD Polycrystalline SiC Films for MEMS Applications
  Published in: Silicon Carbide and Related Materials 2005 (p1103)
• Characterization of Polycrystalline SiC Grown on SiO₂ and Si₃N₄ by APCVD for MEMS Applications
  Published in: Silicon Carbide and Related Materials - 1999 (p541)
• Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices
  Published in: Silicon Carbide and Related Materials 2003 (p1523)
• Characterization of Poly-SiC Pressure Sensors for High Temperature and High Pressure Applications
  Published in: Silicon Carbide and Related Materials 2011 (p1211)
• Development of a High-Throughput LPCVD Process for Depositing Low Stress Poly-SiC
  Published in: Silicon Carbide and Related Materials 2003 (p305)
• Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining
  Published in: Silicon Carbide and Related Materials 2001 (p755)
• Fabrication of 3C-SiC on SiO₂ Structures Using Wafer Bonding Techniques
  Published in: Silicon Carbide, III-Nitrides and Related Materials (p223)
• Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates
  Published in: Silicon Carbide and Related Materials 2003 (p1531)
• Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence
  Published in: Silicon Carbide, III-Nitrides and Related Materials (p179)
• Mechanical Testing of Flexible Silicon Carbide Interconnect Ribbons
  Published in: Silicon Carbide and Related Materials 2005 (p1107)
• Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining
  Published in: Silicon Carbide and Related Materials - 1999 (p1141)