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Papers by Keyword: Denuded Zones

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A Perspective from Crystal Growth and Wafer Processing on the Properties of Intrinsic Point Defects in Silicon

Authors: Robert J. Falster, Vladimir V. Voronkov

125

The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process

Authors: M.J. Binns, A. Banerjee, R. Wise, D.J. Myers, T.A. McKenna

387

Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers

Authors: A. Karoui, F.S. Karoui, De Ren Yang, George A. Rozgonyi

69

Defects Characterization in SiC by Scanning Photoluminescence Spectroscopy

Authors: L. Masarotto, Jean Marie Bluet, M. Berenguer, P. Girard, Gérard Guillot

393

The Significance of Diffusion Creep and Harper-Dorn Creep at Low Stresses

Authors: Terence G. Langdon

205

The Influence of Low-Energy Argon Implantation and Out-Diffusion Heat Treatments on Hydrogen Enhanced Thermal Donor Formation in P-Type Czochralski Silicon

Authors: Alexander G. Ulyashin, A.N. Petlitskii, Reinhart Job, Wolfgang R. Fahrner, A.K. Fedotov, A.I. Stognii

409

Defect Engineering in the Development of Advanced Silicon Crystals and Wafers

Authors: Jan Vanhellemont

111

EBIC Characterization of Oxygen Precipitation and Denuded Zone in Intrinsically Gettered P-Type Czochralski Silicon

Authors: S. Spiga, Antonio Castaldini, Anna Cavallini, Maria Luisa Polignano, F. Cazzaniga

97

Review of Growth Striations in CZ and MCZ Silicon Wafers

Authors: H. Yamagishi

159

Gettering Efficiencies of ∑=25, ∑=13 and ∑=9 Silicon Bicrystals

Authors: A. Ihlal, O.B.M. Hardouin Duparc, Richard Rizk

621