Virtual Design and Visual Simulation of Cathode Target on Magnetron Sputtering Coater

Yi Chen Zhang; Can Lun Li; Xin Ying Li; Hui Li

doi:10.4028/www.scientific.net/AEF.2-3.1088

Paper Titles

Non-Parametric Model of Magneto-Rheological (MR) Damper Based on Adaptive Neuro-Fuzzy Inference System (ANFIS)
p.1059

Semi-Active Control of Vehicle Seat Suspension System with Magnetorheological Damper
p.1067

Combinatorial Synthesis and Evaluation of Vanadium Oxide Films
p.1071

Vibration Control and Design of Vehicle Engine Mount Activated by Magnetorheological Fluid
p.1077

Research of Film Uniformity on Vacuum Coating by Magnetron Sputtering with Multi-Sites
p.1082

Virtual Design and Visual Simulation of Cathode Target on Magnetron Sputtering Coater
p.1088

Self-Helpingly Exchanging and Charging Batteries for EN-V
p.1093

Improvement of Zero Suspension Force Performance Using a Special Magnet for a Magnetic Suspension Device
p.1099

Adaptive State Feedback Control of Electromagnetic Levitation System for Uncertain Ball Mass
p.1105

HomeAdvanced Engineering ForumAdvanced Engineering Forum Vols. 2-3Virtual Design and Visual Simulation of Cathode...

Virtual Design and Visual Simulation of Cathode Target on Magnetron Sputtering Coater

Abstract:

In order to solve the traditional problems such as long designing cycle and high designing cost, the research applies the virtual simulation technology to the design of cathode target on magnetron sputtering vacuum coater. Through analyzing, modeling and simulating, the process model of a typical cathode target on magnetron sputtering coater is proposed. The virtual design of cathode target framework based on distributed collaborative simulation is constructed, which provides a theorial basis for the research of virtual design on cathode target.Using Solidworks software, parts modeling and assembly modeling of cathode target are realized. Using ADAMS, the movements of charged particles in magnetic field and high frequency alternating electric field are simulated, and the visual animation simulation of particles movement is achieved. The research demonstrates the feasibility of virtual simulation technology on vacuum coater design.

By email View Pdf

You have full access to the following eBook

Read eBook

Info:

Periodical:

Advanced Engineering Forum (Volumes 2-3)

Pages:

1088-1092

DOI:

https://doi.org/10.4028/www.scientific.net/AEF.2-3.1088

Citation:

Cite this paper

Online since:

December 2011

Authors:

Yi Chen Zhang, Can Lun Li, Xin Ying Li, Hui Li

Keywords:

Magnetron Sputtering Coater, Virtual Design, Visual Simulation

Export:

RIS, BibTeX

Permissions:

Creative Commons CC BY 4.0

Citation:

References

[1] H. Zou. Design Principles of Mechanical System, China Science Press, Beijing, (2003).

Google Scholar

[2] T.Y. Xiao, X. L. Han. Research On Infrastructure of Virtual Manufacturing Technology, Computer Integrated Manufacturing System-CIMS. 5 (1999) 56-59.

Google Scholar

[3] C. Shukla, M. Vazquez, F. F. Chen. Virtual manufacturing: An pverview, Computers and Industrial Engineering. 21(1996) 79-82.

Google Scholar

[4] T. Y. Xiao. The Progresses and Prospects of the Research on Virtual Manufacturing. Joural of System Simulation. 9(2004) 1879-(1913).

Google Scholar

[5] K.Y. Shi, R. H. Tan, Q. Li, et al. Research of virtual design platform based on SolidWorks, Machinery Design and Manufacture. 4(2009) 72-74.

Google Scholar

[6] S. H. Wang, D. L. Wang, Y. M. Li. Using Software ANSYS to Analyze Electromagnetic Process, HIGH VOLTAGE APPARATUS. 3(2002) 27-33.

Google Scholar

[7] J. M. Jin. Electromagnetic Field Finite Element Method, China Xi'an Electronic Science and Technology University Press, Xi'an, (2001).

Google Scholar

[8] L. C. Zhang, S. Xu. Finite Element Method in Electromagnetic Computation, China Railway Publishing House, Beijing, (1996).

Google Scholar