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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 110-116Study of Two-Step Electroless Etched Si Nanowire...

Study of Two-Step Electroless Etched Si Nanowire Arrays

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Abstract:

The influence of the nucleation process of Ag particles on the formation of Si nanowire arrays is investigated by two-stage electroless chemical etching. The dimensions of the Ag particles formed in the first stage of the process play an important role in the formation of the Si nanowires. The nucleation and etch result are analysed using SEM. The electrical properties of the resulting Si NW arrays are also studied.

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Mechanical and Aerospace Engineering, ICMAE2011

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Periodical:

Applied Mechanics and Materials (Volumes 110-116)

Pages:

3284-3288

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.110-116.3284

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Online since:

October 2011

Authors:

Chuan Bo Li, Kristel Fobelets, Zahid A.K. Durrani

Keywords:

Ag Catalysts, Electroless Chemical Etching, Si Nanowire Array

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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[33] C. B. Li, K. Fobelets, M. S. Tymieniecki, M. Hamayun, Z. A. K. Durrani, accepted to ECS, Las Vegas, USA (2010).