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Transmittance Characteristics of ITO/SiO2/Nb2O5 Multi-Layered Film

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Abstract:

This paper presents the results of optical characteristics of ITO thin film with different buffer layer thicknesses of SiO2 and Nb2O5 for touch sensor application. SiO2 and Nb2O5 buffer layers were deposited by using RF/DC magnetron sputtering equipment. Buffer layers were inserted between Glass and ITO layer. In order to compare with experimental results, Essential Macleod Program (EMP) was adopted. Based on EMP simulation, [Nb2O5/SiO2/ITO] multi-layered thin film exhibited a high transmittance more than 85% in the visible region. The actual experimental results also showed transmittance more than 85% in the visible region, indicating the simulated results were well matched with experimental ones. The sheet resistance of ITO based film was about 300ohm/sq..

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Periodical:

Applied Mechanics and Materials (Volume 464)

Pages:

73-76

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.464.73

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Online since:

November 2013

Authors:

Yong An Kwon*, Gun Eik Jang

Keywords:

Buffer Layer, ITO, Multilayered Film, Transmittance

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] B.H. Lee, I.G. Kim, S.W. Cho, S.H. Lee, Thin Solid films 302, 25(1997).

Google Scholar

[2] H. Kim, A. Pique, J.S. Horwitz, H. Mattoussi, H. Murata, Z.H. Kafafi, D.B. Chrisey, Appl. Phys. Lett. 79, 284(2001).

Google Scholar

[3] G. Haacke, Annu. Rev. Mater. Sci. 7, 73(1977).

Google Scholar

[4] C.G. Granqvist, Appl. Phys. A. Mater. Sci. Process. 52, 83(1991).

Google Scholar

[5] J.H. Lee, B.O. Park, Thin Solid Films 426, 94–99(2003).

Google Scholar

[6] M. Jung, J. Lee, S. Park, H.J. Chang, J. Cryst. Growth 283, 384–389(2005).

Google Scholar

[7] O. Haga, T. Suzuki, Y. Kashiwaba, H. Watanabe, H.P. Zhang, Y. Segawa, Thin Solid Films 433, 131–134(2005).

DOI: 10.1016/s0040-6090(03)00327-4

Google Scholar

[8] J.L. Zhao, X.M. Li, J.M. Bian, W.D. Yu, X.D. Gao, J. Cryst. Growth 276, 507–512(2005).

Google Scholar

[9] P. Zu, Z.K. Tang, G.K.L. Wong, M. Kawasaki, A. Ohtomo, H. Koinuma, Y. Segawa, Solid State Commun. 103, 459–463(1997).

DOI: 10.1016/s0038-1098(97)00216-0

Google Scholar

[10] P. Thilakan, D. Minarini, S. Loreti, E. Terzini, Thin Solid Films 388(2001).

DOI: 10.1016/s0040-6090(01)00820-3

Google Scholar

[11] M.G. Zebaze Kana, E. Centurioni, D. Iencinella, C. Summonte, Thin Solid Films 500(2006).

DOI: 10.1016/j.tsf.2005.10.068

Google Scholar

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