Preparation and Properties of Pyrolytic Carbon Coating on Carbon Materials Used in Czochraski Single Crystal Silicon Furnace

Wei Zhao; Bo Zhu; Wei Wei Cao

doi:10.4028/www.scientific.net/AMM.597.170

Paper Titles

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The Influencing Factors for the Thickness of Silica Sol-Gel Film by the Dip Coating Process
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Preparation and Properties of Pyrolytic Carbon Coating on Carbon Materials Used in Czochraski Single Crystal Silicon Furnace
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Effects of Laser Parameters on the Formation of Al₂O₃-TiC Coating by Laser-Assisted Combustion
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 597Preparation and Properties of Pyrolytic Carbon...

Preparation and Properties of Pyrolytic Carbon Coating on Carbon Materials Used in Czochraski Single Crystal Silicon Furnace

Abstract:

In this paper, resin and vapor deposition (CVD) pyrolytic carbon coating on carbon materials was designed based on the oxidation erosion and silicification corrosion mechanism. Meanwhile the phase structure, microstructure, anti-oxidation and anti-silicification corrosion mechanisms of both coatings were studied. The surface of resin pyrolytic carbon coating has a lot of defec comparing with CVD pyrolytic carbon coating. After static oxidation test at 900 °C, the resin pyrolytic carbon coating haves some antioxidant protection ability, but after 4 h of static oxidation, weight loss rate is still as high as 30%. Antioxidant effect of CVD pyrolytic carbon coating is good, 4 h oxidation weightlessness rate is about 10%. After silicification corrosion at 1600 °C, CVD pyrolytic carbon has excellent silicification protection ability.

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Periodical:

Applied Mechanics and Materials (Volume 597)

Pages:

170-174

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.597.170

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Online since:

July 2014

Authors:

Wei Zhao*, Bo Zhu, Wei Wei Cao

Keywords:

C/C Composites, CZ Furnace, Graphite, Oxidation Performance

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