Fabrication of V-Groove High Temperature Oxygen Sensor by Gallium Oxide

Kao Feng Yarn; Win Jet Luo

doi:10.4028/www.scientific.net/AMR.1023.137

Paper Titles

Analysis on the Pressure Fluctuation of a 660MW Supercritical Boiler
p.110

Influence of Low NOx Burner Retrofit on the Performances of a Boiler
p.116

Research and Governance on Catalyst Abrasion for Selective Catalytic Reduction (SCR) System in Power Plant Boiler
p.125

Treatment and Analysis on Unit Trip Caused by Primary Fan Stall
p.132

Fabrication of V-Groove High Temperature Oxygen Sensor by Gallium Oxide
p.137

Moving Target Tracking with Robot Based on Laser-Camera Data Fusion
p.141

The Optimization of Equipment Polling Strategy in Intelligent Substation Control System
p.145

Comparison and Analysis on the Impact of Two Typical Rearview Mirrors on Aerodynamic Performance
p.150

Research on Reasoning Method of Diagnosis for the Electronic Engine in Fault Knowledge
p.154

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1023Fabrication of V-Groove High Temperature Oxygen...

Fabrication of V-Groove High Temperature Oxygen Sensor by Gallium Oxide

Abstract:

Effects of a metal oxide structure on the oxygen sensing properties are investigated. In the existence of the etched V-groove gallium oxide geometry, its electrical and sensing properties, i.e., high sensitivity and response time areinvestigated. Grain sizes of the material are dependent on different sputtering conditions and investigated by AFM. Under the partial-voltage circuit measurement, it can be confirmed that the increase of temperature will result in the increase of resistance for the Ga₂O₃ oxygen sensor. From experiment, good stability and repeatability of the oxide sensor are demonstrated when tested under oxygen concentration. These properties show that the oxide structure has a good potential for high sensitivity oxygen sensor.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 1023)

Pages:

137-140

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1023.137

Citation:

Cite this paper

Online since:

August 2014

Authors:

Kao Feng Yarn*, Win Jet Luo

Keywords:

Gallium Oxide, Oxygen Sensor, Sputtering

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] P. Moseley, Sensors and Actuators B, Vol. 6-7, (1992), p.149.

Google Scholar

[2] M. Fleischer and H. Meixner, Sensors and Actuators B, Vol. 6-7, (1992), p.257.

Google Scholar

[3] V. Demarne, R. Sanjines, D. Rosenfeld, F. Levy and A. Grisel, Sensors and Actuators B, Vol. 6-7, (1992), p.704.

Google Scholar

[4] O.K. Tan , W. Cao, Y. Hu , W. Zhu, Ceramics International, Vol. 30, (2004), p.1127.

Google Scholar

[5] C. Baban, Y. Toyoda and M. Ogita, J. Opto. Adv. Mater., Vol. 7, (2005), p.891.

Google Scholar

[6] C. Baban, Y. Toyoda and M. Ogita, Thin Solid Films, Vol. 484, (2005), p.369.

Google Scholar

[7] B. Wang, J. Iqbal, X. Shan, G. Huang, H. Fu, R. Yu, D. Yu, Mater. Chem. Phys., Vol. 113, (2009), p.103.

Google Scholar

[8] H. Hanto, T. Minami, S. Takata, J. Appl. Phys., Vol. 60, (1986), p.482.

Google Scholar

[9] Y.D. Wang, X.H. Wu and Z.L. Zhou, Sensors and Actuators B, Vol. 73, (2001), p.216.

Google Scholar

[10] Y.D. Wang, X.H. Wu and Z.L. Zhou, Solid-State Electron., Vol. 44, (2000), p.1603.

Google Scholar

[11] M.M. Hedges and M.J. Bannister, Key Eng. Mater., Vol. 53, (1991), p.263.

Google Scholar