Preparation of Magnetically Soft, Highly-Densified Fe Cluster-Assembled Films by Impact Cluster Deposition

Abstract:

Highly-densified Fe cluster-assembled films were obtained at room temperature by an energetic cluster deposition. Fe clusters were produced using a plasma-gas-condensation (PGC)-type cluster deposition apparatus with a high cluster productivity. Ionized clusters in a cluster beam were electrically accelerated and directly deposited onto a substrate together with neutral clusters from the same cluster source. By increasing the impact energy of the ionized clusters up to about 1 eV/atom, the obtained cluster-assemblies have packing fractions higher than 0.8 without any serious size change, and result in a soft magnetic behavior up to a frequency range of few hundred MHz.

• Periodical: Advanced Materials Research (Volumes 11-12)
• Pages: 595-598
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.11-12.595
• Online since: February 2006
• Authors: Dong Liang Peng, K. Sumiyama, H. Yamada, Takehiko Hihara, T. Uchida
• Keywords: Cluster Assembly, Fe Cluster, High-Density, Permeability, Soft Magnetic Properties

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