Electrical and Optical Properties of ZnO:Ag Thin-Films Depend on Lamination Formation by DC Magnetron Sputtering

Jin Woo Lee; Yun Hae Kim; Chang Wook Park

doi:10.4028/www.scientific.net/AMR.1110.211

Paper Titles

Experimental Investigation on Image-Based Crack Recognition Characteristics
p.191

Deposition of IGZO or ITZO Thin Films by Co-Sputtering of IZO and GZO or ITO Targets
p.197

Eco-Friendly Glass Color Coating Process Using RF Magnetron Sputtering
p.203

Effect of Temperature on Optical and Photovoltaic Properties of nc-TiO₂ Thin Films for Dye Sensitized Solar Cell
p.207

Electrical and Optical Properties of ZnO:Ag Thin-Films Depend on Lamination Formation by DC Magnetron Sputtering
p.211

Morphological, Electrical and Optical Properties of Al-Doped Zinc Oxide Nanorods
p.218

Spectroscopic Ellipsometry Study on Strain Evolution of Transparent Conductive Thin Films Prepared by RF Sputtering Method
p.222

Surface Plasmon Properties of Silver Nanostructures Fabricated Using Extremely Non-Equilibrium, Hot and Dense Plasma
p.226

Ethanol Vapour Sensing Property of Nitrogen Doped ZnO Fabricated by Spray Pyrolysis
p.231

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1110Electrical and Optical Properties of ZnO:Ag...

Electrical and Optical Properties of ZnO:Ag Thin-Films Depend on Lamination Formation by DC Magnetron Sputtering

Abstract:

Transparent conductive oxides such as Impurity doped indium oxides, tin oxides, zinc oxide systems are widely used in the field of optoelectronics such as Photo voltaic solar cells, Flat panel displays. Recently in case of the ZnO / Ag Multilayer thin films, doping Ag films on the ZnO layer and ZnO deposited on top of it a way that has been used. However, if thin film applied to the semiconductor, because of lamination of various forms, characteristics of stacking sequence and thin film layer is a need for research. In this study, using DC magnetron sputteirng how the stacking sequence of the film and the transparent operation of various process variables, the possibility of the application to electronic devices was confirmed.

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Periodical:

Advanced Materials Research (Volume 1110)

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211-217

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1110.211

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Online since:

June 2015

Authors:

Jin Woo Lee, Yun Hae Kim*, Chang Wook Park

Keywords:

DC Magnetron Sputtering, Thin Film, Transparence Conductive Oxides, Zinc Oxide

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