Spectroscopic Ellipsometry Study on Strain Evolution of Transparent Conductive Thin Films Prepared by RF Sputtering Method

Abstract:

In this study, AZO films were deposited by RF sputtering technique. Then, the state of residual stress in the AZO films was investigated by using spectroscopic ellipsometry (SE) and XRD methods. Our experiments show that a suitable SE model could provide useful indication about the variation of stress in the as-deposited films. However, there is a disparity in the results of the SE fitting and XRD stress analysis for annealed AZO films. Further investigation is required in order to understand the cause of this contradiction. Despite this disparity, the SE technique enables us to monitor strain relaxation in TCO films with a faster and simpler way compared with other methods.

• Periodical: Advanced Materials Research (Volume 1110)
• Pages: 222-225
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.1110.222
• Online since: June 2015
• Authors: Keh Moh Lin*, Yang Hsien Lee, Wen Yeong Huang, Ching Tsun Hsieh, Chih Kai Hsu
• Keywords: Ellipsometry, Optical Property, Residual Stress, Transparent Conductive Oxide

References

[1] K. Nomura, H. Ohta, K. Ueda, T. Kamiya, M. Hirano, H. Hosono, Science Vol. 300 (2003), p.1269.

[2] A.N. Banerjee, C.K. Ghosh, K.K. Chattopadhyay, H. Minoura, A.K. Sarkar, A. Akiba, A. Kamiya, T. Endo, Thin Solid Films Vol. 496 (2006), p.112.

DOI: 10.1016/j.tsf.2005.08.258

[3] Y. Leterrier, Prog. Mater. Sci. Vol. 48 (2003), p.1.

[4] Á. Németh, Cs. Major, M. Fried, Z. Lábadi, I. Bársony, Thin Solid Films Vol. 516 (2008), p.7016.

DOI: 10.1016/j.tsf.2007.12.012

[5] Q. -G. Lin, X. -Y. Gao, J.H. Gu, Y. -S. Chen, S. -E. Yang, J. -X. Lu, Chin. Phys. Lett. Vol. 25-12 (2008), p.4223.

[6] J.A. Woollam: Guide to Using WVASE32® (2003).

[7] K. Lin, P.J. Tsai, Thin Solid Films Vol. 515 (2007), p.8601.

[8] C.M. Lai, K. Lin, S. Rosmaidah, J. Sol-gel Sci. Techn. Vol. 61 (2012), p.249.