The Detection of Different Physical Properties of Laser-Damaged HfO2 Film on SiO2 Substrate by Scanning Probe Acoustic Microscope
Different physical properties of laser-damaged HfO2 film on SiO2 substrate were detected by scanning probe acoustic microscope. Surface topographies of SPM showed that the depth of laser-damaged hole on the HfO2 film was close to the thickness of film, while the phase images in probe-vibration mode of SPAM showed that the hydrophilicity of damaged area of HfO2 film was higher than undamaged area which led to stronger absorption to water vapor in air. Some scratches on SiO2 substrate surface under HfO2 film was found in the acoustic images in sample-vibration mode of SPAM.
Jianmin Zeng, Taosen Li, Shaojian Ma, Zhengyi Jiang and Daoguo Yang
W. G. Yao and Q. Cheng, "The Detection of Different Physical Properties of Laser-Damaged HfO2 Film on SiO2 Substrate by Scanning Probe Acoustic Microscope", Advanced Materials Research, Vols. 194-196, pp. 2448-2451, 2011