Control System Research of 2-DOF Precision Positioning Table for IC Packaging

Xiao Mei Feng; Xiu Bing Duan; Da Wei Zhang; Wen Kai Liu; Ai Li Sun

doi:10.4028/www.scientific.net/AMR.211-212.761

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 211-212Control System Research of 2-DOF Precision...

Control System Research of 2-DOF Precision Positioning Table for IC Packaging

Abstract:

In order to improve the precision and efficiency of IC packaging for wafer wire bonding equipment, a new 2-DOF positioning table of high speed and accuracy, directly driven by voice coil actuator, is put forward. By establishing dynamic model of VCA and positioning table, the electromechanical coupling control system based on minimum deadbeat response controlling algorithm is proposed. The prototype experiment shows that the new 2-DOF positioning table is robust and of good dynamic performance.

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Periodical:

Advanced Materials Research (Volumes 211-212)

Pages:

761-765

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.211-212.761

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Online since:

February 2011

Authors:

Xiao Mei Feng, Xiu Bing Duan, Da Wei Zhang, Wen Kai Liu, Ai Li Sun

Keywords:

Control System, Positioning Table, VCA

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