Sol-Gel Processing by Organic Polymer Addition for Silica Antireflective Coatings

Abstract:

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Based on TEOS system and sol-gel process together with catalysts and organic polymer, the microstructure of SiO2 film is controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show an antireflective film produced by incorporation of organic polymer in the precursor solution is a more effective method of effect the uniformly porous structures of SiO2 thin film on the glass substrate.

Info:

Periodical:

Advanced Materials Research (Volumes 211-212)

Edited by:

Ran Chen

Pages:

780-783

DOI:

10.4028/www.scientific.net/AMR.211-212.780

Citation:

R. M. Jin et al., "Sol-Gel Processing by Organic Polymer Addition for Silica Antireflective Coatings", Advanced Materials Research, Vols. 211-212, pp. 780-783, 2011

Online since:

February 2011

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Price:

$35.00

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