Sol-Gel Processing by Organic Polymer Addition for Silica Antireflective Coatings

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Abstract:

Based on TEOS system and sol-gel process together with catalysts and organic polymer, the microstructure of SiO2 film is controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show an antireflective film produced by incorporation of organic polymer in the precursor solution is a more effective method of effect the uniformly porous structures of SiO2 thin film on the glass substrate.

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Periodical:

Advanced Materials Research (Volumes 211-212)

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780-783

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Online since:

February 2011

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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Google Scholar

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Google Scholar

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