Design of an Electrostatics Lens of the Micro-Column Microscopes Using a Multi-Gated FEA
A crossover point was observed with a fabricated quintuple-gated micro-column by an enhanced knife-edge measurement. Developing this result, we designed a new tiny electron beam microscope using multi-gated micro-column by using scale down rule of a micro-column. A beam spot size of the proposed device was estimated to be 50nm by an electron beam trajectories simulation. Exact techniques were developed and demonstrated for the fabrication of the proposed device.
A. Koike et al., "Design of an Electrostatics Lens of the Micro-Column Microscopes Using a Multi-Gated FEA", Advanced Materials Research, Vol. 222, pp. 94-97, 2011