Design of an Electrostatics Lens of the Micro-Column Microscopes Using a Multi-Gated FEA

Akifumi Koike; Yasuo Takagi; Takahiro Fujino; Toru Aoki; Y. Neo; Hidenori Mimura; Tomoya Yoshida; Masayoshi Nagao; Kentaro Sakai; Hidekazu Murata

doi:10.4028/www.scientific.net/AMR.222.94

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 222Design of an Electrostatics Lens of the...

Design of an Electrostatics Lens of the Micro-Column Microscopes Using a Multi-Gated FEA

Abstract:

A crossover point was observed with a fabricated quintuple-gated micro-column by an enhanced knife-edge measurement. Developing this result, we designed a new tiny electron beam microscope using multi-gated micro-column by using scale down rule of a micro-column. A beam spot size of the proposed device was estimated to be 50nm by an electron beam trajectories simulation. Exact techniques were developed and demonstrated for the fabrication of the proposed device.

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Periodical:

Advanced Materials Research (Volume 222)

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94-97

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.222.94

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Online since:

April 2011

Authors:

Akifumi Koike, Yasuo Takagi, Takahiro Fujino, Toru Aoki, Y. Neo, Hidenori Mimura, Tomoya Yoshida, Masayoshi Nagao, Kentaro Sakai, Hidekazu Murata

Keywords:

Electron Gun, Micro-Column, Scanning Electron Microscope (SEM)

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References

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