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Influence of Plasma Parameters and Circuit Connecting on Harmonics Generated in Ar/O2 13.56 Mhz Plasma Discharge

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Abstract:

A non invasive ex-situ harmonic probe technique was used to characterize the plasma-generated harmonics of Ar/O2 plasma. To extract the harmonics, we used an iterative least-squares curve fitting algorithm and taking into account the presence of parasitic electrical elements. This study reports the influence of the process parameters on the harmonic response (from 2nd to 7th) to reveal the most sensitive electrical measurements that represent faithfully the evolution of the plasma. The electrical response of the matching network and the electrical model circuit chamber was taken into account.

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Periodical:

Advanced Materials Research (Volume 227)

Pages:

181-184

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.227.181

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Online since:

April 2011

Authors:

Rabah Tadjine, Hadj Lahmar, Mohamed Mounis Alim

Keywords:

CCP, Diagnostic, Electrical Characterization, I-V Probe, RF Plasma

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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