Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor

Abstract:

An electrothermally actuated planar micromotor has been developed for multi degree-of-freedom (DoF) motion, including rolling along the vertical or horizontal axes, spinning about the z-axis, and also the out-of-plane piston motion. In this design, a light-weight spherical solder ball rotor with plastic core is supported by electrothermal actuator array (EAA). Each bimorph actuator consists of the silicon and aluminum layers to produce large vertical deflection due to their distinct coefficients of thermal expansion (CTE). The micromotor fabrication procedures involve standard CMOS-MEMS processes. Rolling and spinning motions of the spherical rotor are performed by driving the electrothermal actuators with multi-phase signals, and the piston motion can be achieved by synchronizing the drive signals to all actuators without phase difference. The dynamic behavior of this micromotor has been successfully predicted by multibody dynamics simulation software. Such unique dynamic motions of this planar micromotor device show promising capabilities in Optical Coherence Tomography (OCT) and Optical Coherence Microscope (OCM) applications. If this sphere is mounted with a highly-reflective mirror platform, it can be used to divert the light beam to achieve a full 360° circumferential scan about the optical axis.

• Periodical: Advanced Materials Research (Volume 254)
• Pages: 115-119
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.254.115
• Online since: May 2011
• Authors: Xiao Jing Mu, Winston Sun, Han Hua Feng, Guang Ya Zhou, Fook Siong Chau
• Keywords: Actuator Array, Micro-Electromechanical System (MEMS), Micromotor

References

[1] Kenjiro Takemura, Nobuyuki Kojima and Takashi Maeno, Development of a Bar-Shaped Ultrasonic Motor with Three Degrees of Freedom, Proc. Fourth International Conference on Motion and Vibration Control, Vol. 1, 1998, pp.195-200

[2] Cheol-Ho YUN, Shinichiro NIWANO, James R. FRIEND, Kentaro NAKAMURA and Sadayuki UEHA, Support Mechanism for the Ball Rotor in the Three-Degree-of-Freedom Ultrasonic Motor, Japanese Journal of Applied Physics. Vol. 42 (2003) p.3000–3001. Part 1, No. 5B, May (2003)

DOI: 10.1143/jjap.42.3000

[3] Manabu AOYAGI, Toshinori NAKAJIMA, Yoshiro TOMIKAWA and Takehiro TAKANO, Examination of Disk-Type Multi degree-of-Freedom Ultrasonic Motor, Japanese Journal of Applied Physics Vol. 43,No. 5B, 2004, p.2884–2890

DOI: 10.1143/jjap.43.2884

[4] Manaba Aoyagi, Steve P. Beeby, and Neil M. White, A Novel Multi-Degree-of-Freedom Thick-Film Ultrasonic Motor, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, VOL. 49, NO. 2: FEBRUARY (2002)

DOI: 10.1109/58.985699

[5] Yasuyuki Goda, Daisuke Koyama, and Kentaro Nakamura, Design of Multi-Degree-of-Freedom Ultrasonic Micromotors, Japanese Journal of Applied Physics 48 (2009) 07GM06

DOI: 10.1143/jjap.48.07gm06

[6] Kayo Otokawa and Takashi Maeno, Development of an Arrayed-type Multi-Degree-of-Freedom Ultrasonic Motor Based on a Selection of Reciprocating Vibration Modes, Proc. IEEE International Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniversary Joint Conference, (2004)

DOI: 10.1109/ultsym.2004.1417995

[7] Ter Fong Khoo, Dinh Huy Dang, James Friend, Denny Oetomo and Leslie Yeo, Triple Degree-of-Freedom Piezoelectric Ultrasonic Micromotor via Flexural-Axial Coupled Vibration, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 56, no. 8, August (2009)

DOI: 10.1109/tuffc.2009.1236