Fabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-Disc
Micropumps represent one of the major components in microfluidic technology. This paper describes the fabrication and performance testing of a simple, compact, inexpensive and disposable micropump suitable for microfluidic applications. The micropump was fabricated with polydimethylsiloxane (PDMS) which was bonded permanently on glass substrate. Piezoelectric-discs were used to actuate the micropumps. As a flow-rectifying element, the diffusers were used instead of passive check valves. The performances of the micropump, such as pump rate, were characterized. The flow rate of micropump increases with enhancing the applied voltage to piezoelectric-disc due to the increase of diaphragm deflection. The flow rate of the micropump with diffusers were about 9 μl/min when applying a 20 V square wave driving voltage at 300 Hz. This prototype can be used as a platform to develop an inexpensive micropump which is suitable to be part of a disposable microfluidic system.
Lynn Khine and Julius M. Tsai
L. L. Sun et al., "Fabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-Disc", Advanced Materials Research, Vol. 254, pp. 179-182, 2011