A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab

Nan Wang; Fu Li Hsiao; Moorthi Palaniapan; Ming Lin Julius Tsai; Jeffrey B.W. Soon; Dim Lee Kwong; Cheng Kuo Lee

doi:10.4028/www.scientific.net/AMR.254.195

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 254A Novel Micromechanical Resonator Using...

A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab

Abstract:

Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1,000 at its resonant frequency of 152.46MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for RF communications and sensing applications.

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Advanced Materials Research (Volume 254)

Pages:

195-198

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.254.195

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Online since:

May 2011

Authors:

Nan Wang, Fu Li Hsiao, Moorthi Palaniapan, Ming Lin Julius Tsai, Jeffrey B.W. Soon, Dim Lee Kwong, Cheng Kuo Lee

Keywords:

Cavity-Mode, CMOS Compatible, Phononic Crystal, Resonator

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