A New Robust Four Degree-of-Freedom Gyroscope Design

Kean Lee Kang; Jin Xie; Ming Lin Julius Tsai

doi:10.4028/www.scientific.net/AMR.254.199

Paper Titles

Proposal and Fabrication of a Temperature-Field Stage with an NN-Type Peltier Device
p.183

Effect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron Sputtering
p.187

On-Chip Trapping and Characterization of Cryptosporidium Using Surface Coated ITO-PDMS Bonded Chips
p.191

A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab
p.195

A New Robust Four Degree-of-Freedom Gyroscope Design
p.199

Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes
p.203

Investigation of Rhabdomyosarcoma Cell Electrofusion
p.207

Investigation of Simple Process Technology for the Fabrication of Valveless Micropumps
p.211

Micro-Bubble Generation Using Continuous-Wave Laser
p.215

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 254A New Robust Four Degree-of-Freedom Gyroscope...

A New Robust Four Degree-of-Freedom Gyroscope Design

Abstract:

This paper presents a new design of vibratory four degree-of-freedom (DOF) gyroscope, which is inherently robust to keep stable sensitivity under changes of environmental temperature and pressure. The frequency response of the gyroscope has two resonant peaks close to each other, and the operating range is in the flat region between the two peaks. Simulation results show that the sensing amplitude increases by only 1.6% when the temperature rises from 25°C to 75 °C, and drops by only 6% when the pressure increases from 0.1 to 1 Torr.

You might also be interested in these eBooks

NEMS/MEMS Technology and Devices, ICMAT2011

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 254)

Pages:

199-202

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.254.199

Citation:

Cite this paper

Online since:

May 2011

Authors:

Kean Lee Kang, Jin Xie, Ming Lin Julius Tsai

Keywords:

Frequency Response, Gyroscope, Micro-Electromechanical System (MEMS), Vibratory

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] C. Acar, A. M. Shkel, Inherently Robust Micromachined Gyroscopes With 2-DOF Sense-Mode Oscillator. Journal of Microelectromechanical Systems Vol. 15 no. 2 (2006) 380-387.

DOI: 10.1109/jmems.2006.872224

Google Scholar

[2] C. -H. Cho, Characterization of Young's modulus of silicon versus temperature using a beam deflection, method with a four-point bending fixture, Current Applied Physics 9 (2009) 538-545.

DOI: 10.1016/j.cap.2008.03.024

Google Scholar

[3] R. Pratap, S. Mohite, A.K. Pandey, Squeeze Film Effects in MEMS Devices, Journal of the Indian Institute of Science 87 (2007) 75-94.

Google Scholar