Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes
A three-axis capacitive accelerometer based on SOI is presented. Acceleration is detected by both in-plane and vertical comb electrodes. Separating the three-axis sensing with different groups of comb electrodes enables direct detection for each axis with full differential capacitive sensing scheme. The capacitance sensitivities of X and Y accelerometer are 160.7 fF/g and Z accelerometer 21.6 fF/g.
Lynn Khine and Julius M. Tsai
J. Xie et al., "Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes", Advanced Materials Research, Vol. 254, pp. 203-206, 2011