Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes

Jin Xie; Rahul Agarwal; Kia Hian Lau; You He Liu; Ming Lin Julius Tsai

doi:10.4028/www.scientific.net/AMR.254.203

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 254Three-Axis Capacitive SOI Accelerometer Using...

Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes

Abstract:

A three-axis capacitive accelerometer based on SOI is presented. Acceleration is detected by both in-plane and vertical comb electrodes. Separating the three-axis sensing with different groups of comb electrodes enables direct detection for each axis with full differential capacitive sensing scheme. The capacitance sensitivities of X and Y accelerometer are 160.7 fF/g and Z accelerometer 21.6 fF/g.

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Periodical:

Advanced Materials Research (Volume 254)

Pages:

203-206

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.254.203

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Online since:

May 2011

Authors:

Jin Xie, Rahul Agarwal, Kia Hian Lau, You He Liu, Ming Lin Julius Tsai

Keywords:

Accelerometer, Differential Capacitance, In-Plane Comb, SOI, Vertical Comb

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References

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