Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes

Abstract:

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A three-axis capacitive accelerometer based on SOI is presented. Acceleration is detected by both in-plane and vertical comb electrodes. Separating the three-axis sensing with different groups of comb electrodes enables direct detection for each axis with full differential capacitive sensing scheme. The capacitance sensitivities of X and Y accelerometer are 160.7 fF/g and Z accelerometer 21.6 fF/g.

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Periodical:

Edited by:

Lynn Khine and Julius M. Tsai

Pages:

203-206

DOI:

10.4028/www.scientific.net/AMR.254.203

Citation:

J. Xie et al., "Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes", Advanced Materials Research, Vol. 254, pp. 203-206, 2011

Online since:

May 2011

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Price:

$35.00

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