Microstructure and Damping Property of the Composite Discontinuous NiTi SMA Thin Films Deposited on PZT Substrate

Abstract:

Discontinuous NiTi SMA thin films were deposited on PZT substrate by magnetron sputtering method with a specially designed pore plate. The microstructure and damping property of the prepared composite were studied with X-Ray diffraction, scanning electric microscopy and dynamic elastic modulus apparatus. It was found that the NiTi SMA thin films with physical dimension of the width of less-than or equal to 2mm and distance between the adjacent thin films of 1mm are of best equiaxed crystal structure after crystallization at 600°C. The damping effect of the composite is still caused by PZT and the damping value is generally lower than that of pure PZT, about 9.9%.

• Periodical: Advanced Materials Research (Volumes 295-297)
• Pages: 1951-1957
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.295-297.1951
• Online since: July 2011
• Authors: Qing Suo Liu, Zhan Ji Dong, De Qun Kong
• Keywords: Composite, Damping Property, Discontinuous Niti Sma Thin Films, Microstructure, PZT

References

[1] Ishida A, Martynov Valery. Sputter-Deposited shape-memory alloy thin films: properties and applications [J]. MRS Bulletin, 2002, 27 (2):111-114.

DOI: 10.1557/mrs2002.46

[2] Kim Ick-jun, Lee Hee-Woong. Fabrication of TiNi/PZT Heterostructure Films For Smart Systems [J]. Scripta Material, 2001, 44: 525-530.

DOI: 10.1016/s1359-6462(00)00630-8

[3] Shen X, Han JH, Lee, I. Study of a Reduced and Internally Biased Oxide Wafer PZT Actuator and Its Integration with Shape Memory Alloy [J]. Smart Materials & Structures, 2006, 15(4):89-93.

DOI: 10.1088/0964-1726/15/4/n03

[4] Shen X, Yu Y, Li Y. Study of Rainbow Actuator and its Integration with SMA [J]. Journal of Intelligent Material Systems And Structures, 2008, 19(3):277-281.

DOI: 10.1177/1045389x07083619

[5] Liu QS, Wu XP. Preparation of NiTi SMA/PZT Heterogeneity Composite Based on PZT by Magnetron Sputtering Method[J]. Rare Metal Materials and Engineering, 2009, 38: 428-431. [in Chinese].

[6] Mauro D, Donatello C, Roberto M. Implementation and Testing of Passive Control Devices Based on Shape Memory Alloys [J] .Earthquake Engineer in and Structural Dynamics, 2000, 29(7):945- 968.

DOI: 10.1002/1096-9845(200007)29:7<945::aid-eqe958>3.0.co;2-#

[7] Cheng Jinrong. Preparation And Characterization Of The Ferroelectric-Ferroelastic PZT-NiTi Multilayer Films [J], Journal Of Functional Materials And Devices, 1999, 5(4):255-261.

[8] Thielicke E, Obermeier E. Mir-actuators and their technologies [J], Mechatronics, 2000, 10:431-455.

[9] Ben Poquette, T.A. Asare etc. High Damping in Piezoelectric Reinforce Metal Matrix Composites [J], Journal of Alloys and Compounds, 2004(2):281-288.

[10] Wang YN, Huang YN, Shen HM. Mechanical And Dielectric Loss Related To Ferroelectric And Relaxer Phase Transitions And Domain Walls [J], Chinese Journal Of Materials Research, 1994, 8 (1):2-10. [in Chinese].