Microstructure and Damping Property of the Composite Discontinuous NiTi SMA Thin Films Deposited on PZT Substrate
Discontinuous NiTi SMA thin films were deposited on PZT substrate by magnetron sputtering method with a specially designed pore plate. The microstructure and damping property of the prepared composite were studied with X-Ray diffraction, scanning electric microscopy and dynamic elastic modulus apparatus. It was found that the NiTi SMA thin films with physical dimension of the width of less-than or equal to 2mm and distance between the adjacent thin films of 1mm are of best equiaxed crystal structure after crystallization at 600°C. The damping effect of the composite is still caused by PZT and the damping value is generally lower than that of pure PZT, about 9.9%.
Pengcheng Wang, Liqun Ai, Yungang Li, Xiaoming Sang and Jinglong Bu
Q. S. Liu et al., "Microstructure and Damping Property of the Composite Discontinuous NiTi SMA Thin Films Deposited on PZT Substrate", Advanced Materials Research, Vols. 295-297, pp. 1951-1957, 2011