Surface and Structure of Porous Silicon Layers

Article Preview

Abstract:

The porous silicon (PS) layers were fabricated on n(100) and n(111) silicon by applying the constant and repeated currents in different HF solutions. The electrochemical impedance spectroscopy (EIS) was used to in-situ characterize the Si/electrolyte interface before and after the PS formations. The surface and structure of PS layers were examined in terms of electrochemical/surface parameters.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

170-172

Citation:

Online since:

November 2007

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2008 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: