Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect

Jin Dong Xin; Qing Gang Liu; Chao Liu; Ting Ting Li; Shi Yi Liu

doi:10.4028/www.scientific.net/AMR.320.377

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 320Phase Detection for Nanometer Scale Metal Film’s...

Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect

Abstract:

It is found that the phase position of p-component of reflected light changes with the metal film thickness, while the phase position of s-component almost doesn’t change in the Surface Plasmon Resonance effect. S-polarized light is taken as reference and interferometry is adopted to turn the change of the phase position into the change of interference fringes position in the paper, and the film thickness can be derived from it. The simulation results indicated that, through making use of piecewise quadratic fitting on the phase data, the inaccuracy with the range of film thickness is between 30 and 80 nanometers is not more than 0.33 nm.

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Periodical:

Advanced Materials Research (Volume 320)

Pages:

377-381

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.320.377

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Online since:

August 2011

Authors:

Jin Dong Xin, Qing Gang Liu, Chao Liu, Ting Ting Li, Shi Yi Liu

Keywords:

Film Thickness, Interference, Phase Detection, Piecewise Fitting, Surface Plasmon Resonance (SPR)

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