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Optical Parameters of Diamond Films Determined by Spectroscopic Ellipsometry Method

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Abstract:

Diamond film can be used as optical window materials, mask materials and coating materials of optical device and solar cells. Diamond films with different thickness were prepared by HFCVD method. Raman scattering measurement, SEM and AFM show a good diamond character. Optical parameters in infrared region, such as refractive index (n) and extinction coefficient (k) of diamond films with different thickness were determined by spectroscopic ellipsometry method with a proper fitting model.

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Periodical:

Advanced Materials Research (Volumes 347-353)

Pages:

3468-3471

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.347-353.3468

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Online since:

October 2011

Authors:

Xiao Yu Pan, Lin Jun Wang, Jian Huang, Ke Tang, Mei Bi, Wei Min Shi, Yi Ben Xia

Keywords:

Diamond Film, Optical Parameter, Spectroscopic Ellipsometry

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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