Optical Parameters of Diamond Films Determined by Spectroscopic Ellipsometry Method

Abstract:

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Diamond film can be used as optical window materials, mask materials and coating materials of optical device and solar cells. Diamond films with different thickness were prepared by HFCVD method. Raman scattering measurement, SEM and AFM show a good diamond character. Optical parameters in infrared region, such as refractive index (n) and extinction coefficient (k) of diamond films with different thickness were determined by spectroscopic ellipsometry method with a proper fitting model.

Info:

Periodical:

Advanced Materials Research (Volumes 347-353)

Edited by:

Weiguo Pan, Jianxing Ren and Yongguang Li

Pages:

3468-3471

DOI:

10.4028/www.scientific.net/AMR.347-353.3468

Citation:

X. Y. Pan et al., "Optical Parameters of Diamond Films Determined by Spectroscopic Ellipsometry Method", Advanced Materials Research, Vols. 347-353, pp. 3468-3471, 2012

Online since:

October 2011

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Price:

$35.00

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