Characterization of GaN p-n Junction Grown on Si (111) Substrate by Plasma-Assisted Molecular Beam Epitaxy

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In this report, the growth of GaN p-n junction on Si (111) substrate by plasma-assisted molecular beam epitaxy (PAMBE) is demonstrated. Doping of the GaN p-n junction has been carried out using Si and Mg as n-type and p-type dopants, respectively. Silicon substrate is used to grow the GaNpn-junction. In order to improve the crystalline quality of the nitride based junction, AlN is used as a buffer layer. The optical properties of the sample have been characterized by photoluminescence (PL) and Raman spectroscopy.PL spectrum shows a strong band edge emission of GaN at ~364nm, indicating good quality of the sample.The presence of peak ~657cm-1 in Raman measurement has exhibited asuccessful doping of Mg in the sample. The structural properties are measured by high-resolution x-ray diffraction (HR-XRD) and scanning electron microscopy (SEM). The cross section of the SEM image of the sample has shown sharp interfaces.

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139-143

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October 2011

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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[1] S.J. Pearton, J.C. Zolper, R.J. Shul and F. Ren: Journal of Applied Physics, Vol. 86 (1999), p.1.

Google Scholar

[2] S. Nakamura, M. Senoh, S. -i. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, Y. Sugimoto and H. Kiyoku: Applied Physics Letters Vol 69 (1996), p.1477.

DOI: 10.1063/1.116913

Google Scholar

[3] T. Egawa, B. Zhang and H. Ishikawa: Electron Device Letters, IEEE, Vol 26 (2005), p.169.

Google Scholar

[4] S. Nakamura: Lasers and Electro-Optics, CLEO '96., Summaries of papers presented at the Conference on, (1996), p.68.

Google Scholar

[5] L.S. Chuah, Z. Hassan and H.A. Hassan: Microelectronics International Vol. 25 (2008).

Google Scholar

[6] M. Gladysiewicz, R. Kudrawiec, J. Misiewicz, G. Cywinski, M. Siekacz, P. Wolny and C. Skierbiszewski: Applied Physics Letters Vol 98 (2011) p.231902.

DOI: 10.1063/1.3592801

Google Scholar

[7] H. Cheng Lee, Y. Kuin Su, W. k. Chuang, J. Ching Lin, K. Chin Huang, Y. Cheng Cheng and K. Jen Chang: Solar Energy Materials and Solar Cells Vol. 94 (2010), p.1259.

DOI: 10.1016/j.solmat.2010.03.020

Google Scholar

[8] O. Jani, I. Ferguson, C. Honsberg and S. Kurtz: Applied Physics Letters Vol. 91 (2007), p.132117.

Google Scholar

[9] Y. Yoshizumi, S. Hashimoto, T. Tanabe and M. Kiyama: Journal of Crystal Growth Vol. 298 (2007), pp.875-878.

DOI: 10.1016/j.jcrysgro.2006.10.246

Google Scholar

[10] R. Hickman, J.M. Van Hove, P.P. Chow, J.J. Klaassen, A.M. Wowchak, C.J. Polley, D.J. King, F. Ren, C.R. Abernathy, S.J. Pearton, K.B. Jung, H. Cho and J.R. La Roche: Solid-State Electronics Vol. 44 (2000), p.377.

DOI: 10.1016/s0038-1101(99)00245-2

Google Scholar

[11] C. Guarneros and V. Sánchez: Materials Science and Engineering: B, Vol. 174 (2010), p.263.

Google Scholar

[12] M. Lachab, D.H. Youn, R.S. Qhalid Fareed, T. Wang and S. Sakai: Solid-State Electronics Vol 44 (2000), p.1669.

DOI: 10.1016/s0038-1101(00)00072-1

Google Scholar

[13] S. -N. Lee, J. Son, T. Sakong, W. Lee, H. Paek, E. Yoon, J. Kim, Y. -H. Cho, O. Nam and Y. Park: Journal of Crystal Growth Vol. 272 (2004), p.455.

DOI: 10.1016/j.jcrysgro.2004.09.013

Google Scholar

[14] A. Watanabe, T. Takeuchi, K. Hirosawa, H. Amano, K. Hiramatsu and I. Akasaki: Journal of Crystal Growth Vol. 128 (1993), p.391.

Google Scholar

[15] A. Bourret, A. Barski, J.L. Rouviere, G. Renaud and A. Barbier: Journal of Applied Physics Vol. 83 (1998), p. (2003).

Google Scholar

[16] H. Zhang, Z. Ye and B. Zhao: Journal of Applied Physics Vol. 87 (2000), p.2830.

Google Scholar

[17] N. Grandjean and J. Massies: Materials Science and Engineering B Vol. 59 (1999), p.39.

Google Scholar

[18] K.P. Beh, F.K. Yam, C.W. Chin, S.S. Tneh and Z. Hassan: Journal of Alloys and Compounds Vol. 506 (2010), p.343.

Google Scholar

[19] H. Hiroshi: L Journal of Physics: Condensed Matter Vol. 14 (2002), p.967.

Google Scholar

[20] A. Kaschner, H. Siegle, G. Kaczmarczyk, M. Strassburg, A. Hoffmann, C. Thomsen, U. Birkle, S. Einfeldt and D. Hommel: Applied Physics Letters Vol. 74 (1999), p.3281.

DOI: 10.1063/1.123320

Google Scholar