Electrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process

Abstract:

Article Preview

Electrostatic potential and electrostatic discharge (ESD) has been a factory issue for years, not only limited to semiconductor-based electronic devices, but there are evidences that new devices from emerging technologies become sensitive which are MEMS and NEMS. This paper describes new electrostatic control and device handling solutions for critical electrostatic control environment for MEMS manufacturing processes. There are experiments of personnel grounding devices, device handling materials, and evaluation of static control surfaces.

Info:

Periodical:

Advanced Materials Research (Volumes 378-379)

Edited by:

Brendan Gan, Yu Gan and Y. Yu

Pages:

659-662

DOI:

10.4028/www.scientific.net/AMR.378-379.659

Citation:

A. Chakkaew and W. Titiroongruang, "Electrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process", Advanced Materials Research, Vols. 378-379, pp. 659-662, 2012

Online since:

October 2011

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.