Electrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process

Abstract:

Electrostatic potential and electrostatic discharge (ESD) has been a factory issue for years, not only limited to semiconductor-based electronic devices, but there are evidences that new devices from emerging technologies become sensitive which are MEMS and NEMS. This paper describes new electrostatic control and device handling solutions for critical electrostatic control environment for MEMS manufacturing processes. There are experiments of personnel grounding devices, device handling materials, and evaluation of static control surfaces.

• Periodical: Advanced Materials Research (Volumes 378-379)
• Pages: 659-662
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.378-379.659
• Online since: October 2011
• Authors: Anusorn Chakkaew, Wisut Titiroongruang
• Keywords: Electrostatic Discharge (ESD), ESD, Micro-Electromechanical System (MEMS), Personal Grounding

References

[1] ANSI/ESD S20.20-2007, Protection of Electrical and Electronic Parts, Assemblies and Equipment (Excluding Electrically Initiated Explosive Devices) 4, (2007).

[2] ANSI/ESD S7.1, For the Protection of Electrostatic Discharge Susceptible Items - Floor Materials Characterization of Materials (2005)