The Influence of the Post-Annealing Temperature on the Crystalline Orientation and the Crystallinity of PZT Films

Abstract:

In this article, based on nucleation and growth mechanism of films, different process conditions of rapid thermal annealing (RTA) had been investigated to attain different orientation and the crystallinity of PZT film. At first, the PZT films had been fabricated by magnetron sputtering on Si/SiO2/Ti/Pt substrates, then crystallized by different stepped rapid thermal annealing process. X-ray diffraction (XRD) was used to analyze the crystal structures of the films and scanning electron microscope (SEM) was used to analyze the surface morphology of the films. As a conclusion about the research is that it is good for controlling the crystallographic orientation and enhancing the crystallinity of PZT film by different stepped rapid thermal annealing process

• Periodical: Advanced Materials Research (Volumes 490-495)
• Pages: 3845-3849
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.490-495.3845
• Online since: March 2012
• Authors: Jing Wan, Cheng Tao Yang, Yang Gao
• Keywords: Crystalline Orientation, Crystallinity, PZT Film, Rapid Thermal Annealing (RTA)

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