The Acoustic Micro Integrated Detection Technique for Silicon Wafer Processing

An Yu Sun; Bing Feng Ju

doi:10.4028/www.scientific.net/AMR.497.151

Paper Titles

Effects of Process Parameters on Surface Gloss in Rapid Heat Cycle Molding Process
p.132

New Measurement Concept of Nanometer-Level Defects on Si Wafer Surface by Using Micro Contact Sensor
p.137

Absolutely Testing of Off-Axis Aspherical Mirror Using Dichotomy Computer-Generated Holograms
p.142

Dual-Servo Mechanism of STM for Measurement of Sub Millimeter Deep Trench Structures
p.146

The Acoustic Micro Integrated Detection Technique for Silicon Wafer Processing
p.151

XTEM Observation of 4H-SiC (0001) Surfaces Processed by Plasma Assisted Polishing
p.156

Plasma Chemical Vaporization Machining of Silicon Carbide Wafer Using Flat-Bar Electrode with Multiple Gas Nozzles
p.160

Simulation of Large Scale KDP Crystal Polishing by Computer Controlled Micro-Nano Deliquescence
p.165

Study of Magnetorheological Brush Finishing (MRBF) for Concave Surface of Conformal Optics
p.170

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 497The Acoustic Micro Integrated Detection Technique...

The Acoustic Micro Integrated Detection Technique for Silicon Wafer Processing

Abstract:

This document presents an integrated detection method for the whole cycle of silicon wafer processing based on Scanning Acoustic Microscope (SAM). It can be used for thickness and chamfering measurement, surface and subsurface testing, internal defects detection and identification. A SAM system was designed for silicon processing and silicon-based devices fabrication. It has more favorable measuring accuracy and quantitative analysis ability than the traditional inspection equipments using for wafer process such as infrared detector.

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Periodical:

Advanced Materials Research (Volume 497)

Pages:

151-155

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.497.151

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Online since:

April 2012

Authors:

An Yu Sun, Bing Feng Ju

Keywords:

Integrated Detection, Nondestructive Testing (NDT), Scanning Acoustic Microscope, Silicon

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