Dual-Servo Mechanism of STM for Measurement of Sub Millimeter Deep Trench Structures

Wei Zhang; Chao Jin; Yuan Liu Chen; Bing Feng Ju

doi:10.4028/www.scientific.net/AMR.497.146

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Dual-Servo Mechanism of STM for Measurement of Sub Millimeter Deep Trench Structures
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 497Dual-Servo Mechanism of STM for Measurement of Sub...

Dual-Servo Mechanism of STM for Measurement of Sub Millimeter Deep Trench Structures

Abstract:

This paper presents a new control method of the Z-direction module of STM (scanning tunnel microscope). The major component of our method is a dual-servo mechanism, which is consist of a PZT (Piezoelectric Transducer) and a motorized micro displacement stage. Traditionally, STM employs PZT as the servo scanner, which provides very high precision but has a small range. The mean idea of our method is compensating the insufficient measuring range of the PZT through a motorized micro displacement stage. Our method succeeds to eliminates the limitation of measuring range of PZT and enlarges the vertical measurement scale of STM from sub-micrometer to sub-millimetre.

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Periodical:

Advanced Materials Research (Volume 497)

Pages:

146-150

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.497.146

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Online since:

April 2012

Authors:

Wei Zhang, Chao Jin, Yuan Liu Chen, Bing Feng Ju

Keywords:

Dual-Servo Mechanism, Large Scanning Scale, Steep-Sidewall Sub Millimeter Structure, STM System

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