New Researches for Fabrication of Micro-Pin in Micro-ECM

Abstract:

Micro-electrode preparation is the key technology in micro-machining of micro- mechanics and micro-parts. In this research, the machining method of micro-pin using micro-electrochemical machining (micro-ECM) was proposed. The principle of micro-pin fabrication is introduced and the studies are focused on the effects of varies parameters on the shape of the micro-pin. The theoretic model between the shape of micro-pin and the parameters including power, voltage, duty ratio of pulse power, immerge depth of electrode is built up and then verified by experimentations. Experimental results denote that the micro-electrode with desirable shape and size could be prepared by controlling applied parameters. When the immersing depth is deeper, the pulse power, low voltage and duty ratio is proper selected. On the contrary, the DC power or pulse power with higher voltage and duty ratio should be applied. Finally, micro-pin with diameter of 5μm and 60μm long was fabricated when the DC power of 1.8V voltage and immersing depth of 1mm is applied.

• Periodical: Advanced Materials Research (Volume 497)
• Pages: 205-209
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.497.205
• Online since: April 2012
• Authors: Ming Huan Wang, Tao Wang, Wei Peng
• Keywords: Erosion, Micro-ECM, Micro-Pin, Pulse Power

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