Fabrication of Planar Microtoroid Cavities Using High-Power Laser
Planar Microtoroid cavities have important application in many researching and application domains due to their ultrahigh quality factor (Q). But the special toroid structure can not be fabricated through traditional technology. In this paper, a novel processing method for fabricating microtoroid cavities using high-power CO2 laser after a series of traditional processing steps is introduced. The processing details are discussed including light path, focusing system and other important parameters. Test using scanning electronic microscope and laser-Raman spectrum shows that fabrication of planar microtoroid cavity using CO2 laser is feasible. The final microtoroid cavity is fabricated with slight impact to the silicon strut-beam, ensuring excellent optical performance in Planar Microtoroid cavity.
Y. Z. Yan et al., "Fabrication of Planar Microtoroid Cavities Using High-Power Laser", Advanced Materials Research, Vols. 60-61, pp. 347-352, 2009