A Rapid Analysis Method for Microgyroscope Using System Vibration Modes

Guang Jun Liu; An Lin Wang; Zi Yi Yu; Xing Yang; Tao Jiang

doi:10.4028/www.scientific.net/AMR.60-61.353

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 60-61A Rapid Analysis Method for Microgyroscope Using...

A Rapid Analysis Method for Microgyroscope Using System Vibration Modes

Abstract:

This paper proposes a rapid dynamic analysis method for microgyroscope using system vibration modes to solve the problems concerning to the computing time in the performance analysis of microgyroscope. The results of eigenvalue solution are employed to construct the state space model. The response of the microgyros cope can be reconstructed as a response superposition of the vibration modes, and then the system equation is decoupled into an uncoupled equation. The dynamic response of the microgyroscope can be calculated by a simple superposition.