PDMS Microlens Arrays Fabrication Method Based-on Parylene C Lift-Off
Microlenses are important components in optical data interconnects and MEMS-based microscopy imaging. Several microfabrication processes have been developed for the production of microlens arrays. However, assembly of microlens arrays is usually required. In this paper, we demonstrate the application of PDMS membrane patterning based on parylene C lift-off to the construction of PDMS microlens arrays on a glass substrate without an assembly step.
J. H. Tong and Y. Sun, "PDMS Microlens Arrays Fabrication Method Based-on Parylene C Lift-Off ", Advanced Materials Research, Vols. 60-61, pp. 343-346, 2009