PDMS Microlens Arrays Fabrication Method Based-on Parylene C Lift-Off

Jian Hua Tong; Yu Sun

doi:10.4028/www.scientific.net/AMR.60-61.343

Paper Titles

Study on the Gold-Gold Thermocompression Bonding for Wafer-Level Packaging
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Electrokinetic Instability Flow in Nanofilm-Coated Microfluidic Channels
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Design and Simulation of a Micromachined CMOS Temperature Sensor
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A Novel Structure of Membrane Electrode Assembly for DMFC
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PDMS Microlens Arrays Fabrication Method Based-on Parylene C Lift-Off
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Fabrication of Planar Microtoroid Cavities Using High-Power Laser
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A Rapid Analysis Method for Microgyroscope Using System Vibration Modes
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A In Situ Measuring Method for Stress Gradient of a MEMS Film
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Electrical Trimming of Boron-Doped Polysilicon Nanofilm Resistors Deposited at Different Temperatures
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 60-61PDMS Microlens Arrays Fabrication Method Based-on...

PDMS Microlens Arrays Fabrication Method Based-on Parylene C Lift-Off

Abstract:

Microlenses are important components in optical data interconnects and MEMS-based microscopy imaging. Several microfabrication processes have been developed for the production of microlens arrays. However, assembly of microlens arrays is usually required. In this paper, we demonstrate the application of PDMS membrane patterning based on parylene C lift-off to the construction of PDMS microlens arrays on a glass substrate without an assembly step.