Optimizations of ZnO/Si(100) with ZnO/ZnMgO Super Lattice Buffer Layers Grown by Molecular Beam Epitaxy

Chang Lian Jin; Peng Wang; Hua Han Zhan

doi:10.4028/www.scientific.net/AMR.706-708.172

Paper Titles

Multiscale Parameter Identification Method for Three Dimension Steady Heat Transfer Model of Composite Materials
p.152

Nd:YAG Laser Welding between Ti and PET Using Pulse Shaping
p.158

Optimization and Application of Secondary Cooling on 37Mn5 Steel ø210mm Round Billet
p.163

Optimization Decomposition Cast Structure in M35 High-Speed Steel
p.167

Optimizations of ZnO/Si(100) with ZnO/ZnMgO Super Lattice Buffer Layers Grown by Molecular Beam Epitaxy
p.172

Organized Assembly and Morphologies of Aromatic Schiff Base Compounds in Organized Molecular Films
p.176

Oxidition Resistance of Multi-Arc Ion Plating TiN Films
p.180

Parameters Study for Composites Forming Infusion from inside and outside at Same Time
p.184

Performance of Self-Lubricant Bearing from Composite Material and its Application Practice in Textiles
p.189

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 706-708Optimizations of ZnO/Si(100) with ZnO/ZnMgO Super...

Optimizations of ZnO/Si(100) with ZnO/ZnMgO Super Lattice Buffer Layers Grown by Molecular Beam Epitaxy

Abstract:

ZnO with ZnO/ZnMgO super lattice buffer layers grown by molecular beam epitaxy on Si (100) substrates at room temperature were studied by reversing the epitaxial sequence of ZnO or ZnMgO in the super lattice buffer layers, tuning the oxygen power and the vacuum pressure. The crystal quality was improved by supper lattice buffer layers started with ZnO, using higher oxygen power, and proper vacuum pressure in the growth chamber.

You might also be interested in these eBooks

Mechatronics and Intelligent Materials III

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 706-708)

Pages:

172-175

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.706-708.172

Citation:

Cite this paper

Online since:

June 2013

Authors:

Chang Lian Jin, Peng Wang, Hua Han Zhan

Keywords:

MBE, Optimization, Super Lattice Buffer Layers, ZnO/Si(100)

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] D.C. Look, Mater. Sci. Eng. B 80 383 (2001).

Google Scholar

[2] S.J. Pearton, D.P. Norton, K. Ip,Y.W. Heo, T. Steiner, J.Vac.Sci.Technol.B22 932 (2004).

Google Scholar

[3] U. Özgür, Ya.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.-J. Cho, H. Morkoc¸, J. Appl. Phys. 98 041301 (2005).

Google Scholar

[4] D.C. Look, B. Claflin, Ya.I. Alivov, S.J. Park, Phys. Status Solidi, A Appl. Res. 201 2203(2004).

Google Scholar

[5] W. Liu, S.L. Gu, J.D. Ye, S.M. Zhu, Y.X.Wu, Z.P. Shan, R. Zhang, Y.D. Zheng, S.F. Choy, G.Q. Lo, X.W. Sun, J. Cryst. Growth 310 3448 (2008).

Google Scholar

[6] Z. Yang, J.-H. Lim, S. Chu, Z. Zuo, J.L. Liu*, Applied Surface Science 255 3375-3380 (2008).

Google Scholar

[7] Sang Sub Kim, Byung-Teak Lee, Thin Solid Films 446 307-312 (2004).

Google Scholar

[8] Ashkenov N., Mbenkum B.N., Bundesmann C., Riede V., Lorenz M., Spemann D., Kaidashev E.M., Kasic A., Schubert M., Grundmann M., J. Appl. Phys. 93 126 (2003).

DOI: 10.1063/1.1526935

Google Scholar

[9] Dcremos F., Pellicer-Porres J., Saitta A.M., Chervin J.C., Polian A., Phys. Rev. B, 65 092101 (2002).

Google Scholar