High Sensitive Active MOS Photo Detector on the Local 3D SOI-Structure

V.I. Holota; Igor Kogut; Anatoly Druzhinin; Y. Khoverko

doi:10.4028/www.scientific.net/AMR.854.45

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 854High Sensitive Active MOS Photo Detector on the...

High Sensitive Active MOS Photo Detector on the Local 3D SOI-Structure

Abstract:

A structure for single photon detection is analyzed. A special shape of photon detector electrodes on local 3D SOI structure is proposed. The structure of photon detector with a vertical local SOI MOS transistor is designed.

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Periodical:

Advanced Materials Research (Volume 854)

Pages:

45-47

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.854.45

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Online since:

November 2013

Authors:

V.I. Holota, Igor Kogut, Anatoly Druzhinin, Y. Khoverko

Keywords:

3D SOI Structure, Image Sensor, Photon Detection, Vertical MOS Transistor

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References

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