Design Considerations of in-Plane Nanoelectromechanical Switches with Corrugation Beams for Low Voltage Logic Applications

H. Qiu; H. Wang

doi:10.4028/www.scientific.net/AMR.875-877.1712

Paper Titles

Numerical Simulation of Indirectly Heated Hot Water Heater
p.1693

The Influence of Resin Molds Fabricated with Different Forming Angle by Stereolithography on the Transmission Performance of Photonic Crystals
p.1698

Experimental Study on Reactivity of Limestone in FGD System
p.1702

Lightning Protection Research and Simulation of High-Speed Railway Catenary
p.1707

Design Considerations of in-Plane Nanoelectromechanical Switches with Corrugation Beams for Low Voltage Logic Applications
p.1712

Influence of Input Material Kind on Thermic System Furnace Efficiency
p.1716

Control of Grid Voltage Feed-Forward and Crowbar Circuit for DC-Bus Voltage
p.1723

The Comparison Study of Four Lab Scale Microalgae Collection Ways
p.1729

Study on Modeling and Simulating of Micro-Powers and Micro-Grid Construction
p.1734

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 875-877Design Considerations of in-Plane...

Design Considerations of in-Plane Nanoelectromechanical Switches with Corrugation Beams for Low Voltage Logic Applications

Abstract:

Design consideration of nanoelectromechanical switches with low actuation voltage is presented. For a fixed-fixed beam structure design, it has been found that the actuation voltage can be largely reduced by integrating corrugations onto the fixed beam. An actuation voltage less than 3 V can be achieved with a relaxed design rule.