Modelling of the Current-Time Characteristics in Anodic Bonding
The state of knowledge of anodic bonding is reviewed, paying particular attention to the creation of intimate contact and to the microstructure of anodic bonds formed between silicon and Pyrex. Equivalent electrical circuit models of differing degrees of sophistication which have been proposed in the literature to predict the current-time characteristics observed experimentally for a range of conditions of applied voltage and temperature in anodic bonding are critically analysed. It is shown that relatively simple equivalent circuit models comprising capacitors and resistors can be used to account for the main features of the observed current-time characteristics, but that these require the assumption of large relative permittivities for the capacitative components in the models.
K.M. Knowles "Modelling of the Current-Time Characteristics in Anodic Bonding", Advances in Science and Technology, Vol. 45, pp. 1558-1567, 2006