Growth and Characterization of (012)- and (001)-Oriented Epitaxial Anatase Thin Films
Single phase TiO2 thin films of anatase structure have been prepared by reactive electron beam evaporation. Epitaxial (012)- and (001)-oriented anatase films were successfully obtained on (110)- and (100)-oriented SrTiO3 substrates, respectively. X-ray diffraction and cross section transmission electron microscopy investigations revealed a good epitaxial quality of the anatase films grown on the SrTiO3 substrates.
P. VINCENZINI and V. BUSCAGLIA
A. Lotnyk et al., "Growth and Characterization of (012)- and (001)-Oriented Epitaxial Anatase Thin Films", Advances in Science and Technology, Vol. 46, pp. 146-151, 2006