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Fabrication of Bi2Sr2Can-1CunOy / Al2O3-Particles on MgO Films by rf Magnetron Sputtering Method
Abstract:
We deposited Bi2Sr2Ca1Cu2Oy (Bi-2212) superconducting thin films on MgO substrates with or without Al2O3 particles by the rf magnetron sputtering method. From the results, we found that optimum target-substrate distance, rf powers and substrate temperature for obtaining the Bi-2212 films on the MgO substrates were 5mm, 150W and 830°C, respectively. The Bi-2212 films were Bi-2212 single-phase and had the Tc of about 54K . The particle size and the distribution density of Al2O3 were controlled by annealing temperature. The Bi-2212/Al2O3/MgO film showed Bi-2212 single-phase, whereas did not show zero-resistance.
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159-164
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October 2006
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© 2006 Trans Tech Publications Ltd. All Rights Reserved
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