Paper Titles

Self-Assembled Impurity Superlattices and Microcavities in Silicon
p.673

Low Temperature Impurity Diffusion into Large-Band-Gap Semiconductors
p.679

Hybrid Impurity and Self-Diffusion in GaAs and Related Compounds: Recent Progress
p.687

Boron Diffusion in Strained and Relaxed Si_1-xGe_x
p.703

Phosphorus Diffusion in Si_1-xGe_x
p.709

Enhanced Diffusion Following Point Defect Injection into B in SiGe and Si
p.717

Measurements and Modeling of Zinc Diffusion Profiles in Gallium Phosphide
p.723

Defect Formation During Zinc Diffusion in GaP
p.731

Microstructure of GaN Heteroepitaxial Layers after Diffusion of Mg, Zn and Au under High Pressure
p.737

HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 194-199Phosphorus Diffusion in Si1-x Gex

Phosphorus Diffusion in Si_1-xGe_x

Article Preview

Abstract:

You might also be interested in these eBooks

Diffusion in Materials DIMAT2000

Info:

Periodical:

Defect and Diffusion Forum (Volumes 194-199)

Pages:

709-716

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.194-199.709

Citation:

Cite this paper

Online since:

April 2001

Authors:

J.S. Christensen, Andrej Yu. Kuznetsov, H.H. Radamson, Bengt Gunnar Svensson

Keywords:

Diffusion, Germanium, Phosphorus, Segregation, Silicon, Strain

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2001 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: