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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 194-199Self-Assembled Impurity Superlattices and...

Self-Assembled Impurity Superlattices and Microcavities in Silicon

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Diffusion in Materials DIMAT2000

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Periodical:

Defect and Diffusion Forum (Volumes 194-199)

Pages:

673-678

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.194-199.673

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Online since:

April 2001

Authors:

Nikolai T. Bagraev, A.D. Bouravleuv, W. Gehlhoff, L.E. Klyachkin, A.M. Malyarenko, S.A. Rykov

Keywords:

Self-Interstitial, Silicon, Ultra-Shallow Diffusion Profile, Vacancy

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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