Computer Calculations of the Enhanced Diffusivity and Effective Activation Energy from Measured Profiles of Impurites in Silicon

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Periodical:

Defect and Diffusion Forum (Volumes 194-199)

Edited by:

Y. Limoge and J.L. Bocquet

Pages:

653-658

DOI:

10.4028/www.scientific.net/DDF.194-199.653

Citation:

D. K. An "Computer Calculations of the Enhanced Diffusivity and Effective Activation Energy from Measured Profiles of Impurites in Silicon", Defect and Diffusion Forum, Vols. 194-199, pp. 653-658, 2001

Online since:

April 2001

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