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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 194-199Computer Calculations of the Enhanced Diffusivity...

Computer Calculations of the Enhanced Diffusivity and Effective Activation Energy from Measured Profiles of Impurites in Silicon

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Diffusion in Materials DIMAT2000

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Periodical:

Defect and Diffusion Forum (Volumes 194-199)

Pages:

653-658

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.194-199.653

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Online since:

April 2001

Authors:

Khac An Dao

Keywords:

Activation Energy Diminution of Dopant, Effective Activation Energy, Enhanced Diffusivity

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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