Mechanism of Formation and Physical Classification of the Grown-In Microdefects in Semiconductor Silicon

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Periodical:

Defect and Diffusion Forum (Volumes 230-232)

Edited by:

David J. Fisher

Pages:

177-198

DOI:

10.4028/www.scientific.net/DDF.230-232.177

Citation:

V.I. Talanin and I.E. Talanin, "Mechanism of Formation and Physical Classification of the Grown-In Microdefects in Semiconductor Silicon ", Defect and Diffusion Forum, Vols. 230-232, pp. 177-198, 2004

Online since:

November 2004

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$35.00

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